Atomic layer processing : semiconductor dry etching technology /

Bibliographic Details
Main Author:	Lill, Thorsten (Author)
Format:	eBook
Language:	English
Published:	Weinheim, Germany : Wiley-VCH, 2021.
Subjects:	Semiconductors > Etching. Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Physical Description:	1 online resource
Bibliography:	Includes bibliographical references and index.
ISBN:	9783527824199 3527824197 9783527824182 3527824189 9783527824205 3527824200