APA (7th ed.) Citation

Lill, T. (2021). Atomic layer processing: Semiconductor dry etching technology. Wiley-VCH.

Chicago Style (17th ed.) Citation

Lill, Thorsten. Atomic Layer Processing: Semiconductor Dry Etching Technology. Weinheim, Germany: Wiley-VCH, 2021.

MLA (9th ed.) Citation

Lill, Thorsten. Atomic Layer Processing: Semiconductor Dry Etching Technology. Wiley-VCH, 2021.

Warning: These citations may not always be 100% accurate.