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Ultra clean processing of semiconductor surfaces XV selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) : selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium.

Bibliographic Details
Corporate Authors: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Mechelen, Belgium, Knovel (Firm)
Other Authors: Mertens, Paul, Wostyn, Kurt, Meuris, Marc, Heyns, Marc
Format: Conference Proceeding eBook
Language:English
Published: Baech, Switzerland : Scientific.Net : distributed worldwide by Trans Tech Publications Ltd, [2021]
Series:Solid state phenomena, volume 314.
Subjects:
Semiconductors > Surfaces > Congresses.
Semiconductors > Congresses.
Semiconductors.
Semiconductors > Surfaces.
Electronic books.
Conference papers and proceedings.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (xiv, 325 pages :) illustrations.
Bibliography:Includes bibliographical references and index.
ISBN:9783035718010
3035718016
ISSN:1012-0394 ;