Ultra Clean Processing of Semiconductor Surfaces XV

Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) Selected, peer-reviewed papers from the 15-th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Be...

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Bibliographic Details
Main Author:	Mertens, Paul W.
Corporate Author:	Knovel (Firm)
Other Authors:	Wostyn, Kurt, Meuris, Marc, Heyns, Marc
Format:	eBook
Language:	English
Published:	Zurich : Trans Tech Publications, Limited, 2021.
Series:	Solid State Phenomena Ser.
Subjects:	Semiconductors > Surfaces > Congresses. Semi-conducteurs > Surfaces > Congrès. Semiconductors > Surfaces. Electronic books. Conference papers and proceedings.
Online Access:	Connect to the full text of this electronic book

Description
Summary:	Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) Selected, peer-reviewed papers from the 15-th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium.
Physical Description:	1 online resource (325 pages)
ISBN:	3035738017 9783035738018