http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
foundations of vacuum coating technology
The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries.
Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, et cetera; Internet-YouTube, Blogs, et cetera; References; Further Reading
Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces
"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges
Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons
Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation)
Includes bibliographical references and index.