Substrate surface preparation handbook /

"Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidan...

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Bibliographic Details
Main Author:	Robertson, Max
Corporate Author:	Knovel (Firm)
Format:	eBook
Language:	English
Published:	Boston : Artech House, 2012.
Series:	Artech House applied photonics series.
Subjects:	Optical materials > Surfaces. Glass grinding and polishing. Matériaux optiques > Surfaces. Verre > Doucissage et polissage. Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents:

Introduction
Preparation : before the start
Lapping
Polishing
Specific processes and materials
Specialized techniques
Surface finish
Optics
Semiconductor device Deconstruction
Metallurgical Polishing and Microscopy
Laboratory Setup
Using Interferometry.