rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Journal of micro/nanopatterning, materials, and metrology
  title info:
    title: JM³
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: periodical
  genre: Periodicals.
  origin info:
    place:
      place term: wau
    date issued: 2021
    date issued: 9999
    issuance: continuing
    frequency: Quarterly
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource
  subject:
    topic: Microelectronics
    genre: Periodicals
  subject:
    topic: Microfabrication
    genre: Periodicals
  subject:
    topic: Nanostructured materials
    genre: Periodicals
  subject:
    topic: Semiconductor industry
    genre: Periodicals
  subject:
    topic: Microelectronics
  subject:
    topic: Microfabrication
  subject:
    topic: Nanostructured materials
  subject:
    topic: Semiconductor industry
  classification: TK7874 .J6668 Electronic
  classification: 620
  related item:
    name:
      name part: Journal of micro/nanolithography, MEMS, and MOEMS
    identifier: 1932-5134
    identifier: (OCoLC)70631822
    identifier: (DLC) 2006214568
  identifier: 2708-8340
  record info:
    record content source: SFB
    record creation date: 210403
    record change date: 20230103161652.7
    record identifier: in00004632053
    language of cataloging:
      language term: eng