rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Chemistry of atomic layer deposition
  name:
    name part: Barry, Seán T.
    name part: 1968-
    role:
      role term: creator
    role:
      role term: author.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: gw
    date issued: 2022
    copyright date: 2022
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: x, 105 pages : illustrations ; 24 cm.
  note: Seán Thomas Barry.
  note: Includes bibliographical references and index.
  subject:
    topic: Atomic layer deposition
  subject:
    topic: Surface chemistry
  classification: QD506 .B37 2022
  classification: 541/.33
  identifier: 9783110712513
  identifier: 3110712512
  record info:
    record content source: YDX
    record creation date: 210805
    record change date: 20230619132345.8
    record identifier: in00004554123