Cover Image

Chemistry of atomic layer deposition /

Bibliographic Details
Main Author: Barry, Seán T., 1968- (Author)
Format: Book
Language:English
Published: Berlin ; Boston : Water de Gruyter, [2022].
Subjects:
Atomic layer deposition.
Surface chemistry.
Description
Physical Description:x, 105 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:9783110712513
3110712512