Plasma applications for material modification : from microelectronics to biological materials /
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| Format: | eBook |
| Language: | English |
| Published: |
Singapore :
Jenny Stanford Publishing,
[2022]
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781000245219 1000245217 9781000245271 1000245276 9781003119203 1003119204 |