MEMS Resonator Filters /

This book has 11 chapters dealing with Filter design; Microelectromechanical resonators design: low-frequency resonators; Microelectromechanical resonator design for high frequency; Finite-element modeling of RF MEMS resonators; Fabrication of low-frequency resonators; Fabrication of high-frequency...

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Bibliographic Details
Corporate Author:	Institution of Engineering and Technology
Other Authors:	Patrikar, Rajendra M. (Editor)
Format:	eBook
Language:	English
Published:	Stevenage : IET, 2020.
Series:	Materials, Circuits & Devices.
Subjects:	Acoustic surface wave devices. Chip scale packaging. Finite element method. Integrated circuits. Integrated circuits > Design and construction. Integrated circuits > Reliability. Integrated circuits > Testing. Mathematical models. Microfabrication. Radio frequency integrated circuits. bulk acoustic wave devices. finite element analysis. integrated circuit design. integrated circuit manufacture. integrated circuit modelling. integrated circuit packaging. integrated circuit reliability. integrated circuit testing. microfabrication. micromechanical resonators. radiofrequency filters. radiofrequency integrated circuits. radiofrequency oscillators. surface acoustic wave resonator filters. surface acoustic wave resonators. three-dimensional integrated circuits. reliability issues heterogeneous systems integration 3D packaging resonator filters verification MEMS resonator filters testing SAW-BAW resonators oscillator design high-frequency resonators fabrication low-frequency resonators fabrication RF MEMS resonators finite-element modeling microelectromechanical resonators design filter design MEMS resonator filters Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Summary:	This book has 11 chapters dealing with Filter design; Microelectromechanical resonators design: low-frequency resonators; Microelectromechanical resonator design for high frequency; Finite-element modeling of RF MEMS resonators; Fabrication of low-frequency resonators; Fabrication of high-frequency resonators; Filter and oscillator design using SAW/BAW resonators; Testing and verification of MEMS resonator filters; 3D packaging for the integration of heterogeneous systems; and Reliability issues of MEMS resonators.
Physical Description:	1 online resource (432 pages)
ISBN:	9781785618970
DOI:	10.1049/PBCS065E