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Far-infrared dielectric functions : silicon nitride (SiNx), silicon oxide (SiOx), and high-purity silicon (Si) /

Bibliographic Details
Main Authors:	Cataldo, Giuseppe (Author), Wollack, Edward J. (Author)
Format:	Government Document eBook
Language:	English
Published:	Greenbelt, MD : National Aeronautics and Space Administration, Goddard Space Flight Center, September 2020.
Series:	NASA technical memorandum ; 20205007162.
Subjects:	Numerical analysis. Dielectric properties. Dielectrics.
Online Access:	https://purl.fdlp.gov/GPO/gpo146378

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