Handbook of silicon wafer cleaning technology /

Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal as...

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Reinhardt, Karen A. (Editor), Kern, Werner, 1925- (Editor)
Format: eBook
Language:English
Published: Cambridge, MA : William Andrew, [2018]
Edition:Third edition.
Series:Materials science and process technology series.
Subjects:
Online Access:Connect to the full text of this electronic book
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Published 2008
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