Handbook of silicon wafer cleaning technology /
Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal as...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
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Cambridge, MA :
William Andrew,
[2018]
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| Edition: | Third edition. |
| Series: | Materials science and process technology series.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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