APA (7th ed.) Citation

Levinson, H. J. (2019). Principles of lithography (Fourth edition.). SPIE Press.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. Fourth edition. Bellingham, Washington, USA: SPIE Press, 2019.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. Fourth edition. SPIE Press, 2019.

Warning: These citations may not always be 100% accurate.