Levinson, H. J. (2019). Principles of lithography (Fourth edition.). SPIE Press.
Chicago Style (17th ed.) CitationLevinson, Harry J. Principles of Lithography. Fourth edition. Bellingham, Washington, USA: SPIE Press, 2019.
MLA (9th ed.) CitationLevinson, Harry J. Principles of Lithography. Fourth edition. SPIE Press, 2019.
Warning: These citations may not always be 100% accurate.