Catalytic Chemical Vapor Deposition : Technology and Applications of Cat-CVD /
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| Format: | eBook |
| Language: | English |
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Weinheim, Germany :
Wiley-VCH,
[2019]
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Fundamentals for Studying the Physics of Cat-CVD and Difference from PECVD
- Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD
- Physics and Chemistry of Cat-CVD
- Properties of Inorganic Films Prepared by Cat-CVD
- Organic Polymer Synthesis by Cat-CVD-Related Technology - Initiated CVD (iCVD)
- Physics and Technologies for Operating Cat-CVD Apparatus
- Application of Cat-CVD Technologies
- Radicals Generated in Cat-CVD Apparatus and Their Application
- Cat-doping: A Novel Low-Temperature Impurity Doping Technology.