Semiconductor microelectronics and nanoelectronics programs /

Bibliographic Details
Main Author:	Knight, Stephen
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Buckley, Michele, Pinillos, Joaquin V. Martinez de, Obeng, Yaw S.
Format:	Government Document eBook
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2008.
Series:	NISTIR ; 7513.
Online Access:	https://purl.fdlp.gov/GPO/gpo97244