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Semiconductor microelectronics and nanoelectronics programs /

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Bibliographic Details
Main Author: Knight, Stephen
Corporate Author: National Institute of Standards and Technology (U.S.)
Other Authors: Buckley, Michele, Pinillos, Joaquin V. Martinez de, Obeng, Yaw S.
Format: Government Document eBook
Language:English
Published: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2008.
Series:NISTIR ; 7513.
Online Access:https://purl.fdlp.gov/GPO/gpo97244
Description
Item Description:2008.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Physical Description:1 online resource.
Bibliography:Includes bibliographical references.