A Framework for standard modular simulation : application to semiconductor wafer fabrication /

Bibliographic Details
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Fernandez, Emmanuel, Leong, Swee K., Li, Heshan, McLean, Charles R. (Charles Robert), Ramirez-Hernandez, Jose A.
Format:	Government Document eBook
Language:	English
Published:	[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2005]
Series:	NISTIR ; 7236.
Subjects:	Semiconductor wafers > Standards.
Online Access:	https://purl.fdlp.gov/GPO/gpo95707

Description
Item Description:	Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. Title from page 1, viewed April 6, 2007. Electronic resource.
Physical Description:	1 online resource (17 pages) : illustrations.
Bibliography:	Includes bibliographical references.