APA (7th ed.) Citation

National Institute of Standards and Technology (U.S.), Fernandez, E., Leong, S. K., Li, H., McLean, C. R., & Ramirez-Hernandez, J. A. (2005). A Framework for standard modular simulation: Application to semiconductor wafer fabrication. U.S. Dept. of Commerce, National Institute of Standards and Technology.

Chicago Style (17th ed.) Citation

National Institute of Standards and Technology (U.S.), Emmanuel Fernandez, Swee K. Leong, Heshan Li, Charles R. McLean, and Jose A. Ramirez-Hernandez. A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication. [Gaithersburg, MD]: U.S. Dept. of Commerce, National Institute of Standards and Technology, 2005.

MLA (9th ed.) Citation

National Institute of Standards and Technology (U.S.), et al. A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication. U.S. Dept. of Commerce, National Institute of Standards and Technology, 2005.