Semiconductor factory and equipment clock synchronization for e-manufacturing /

Bibliographic Details
Main Author: Li, Ya-Shian
Corporate Authors: Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology), International SEMATECH
Other Authors: Van Eck, Brad
Format: Government Document eBook
Language:English
Published: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2004]
Series:NISTIR ; 7184.
Subjects:
Online Access:https://purl.fdlp.gov/GPO/gpo98859

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