Semiconductor factory and equipment clock synchronization for e-manufacturing /
| Main Author: | Li, Ya-Shian |
|---|---|
| Corporate Authors: | Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology), International SEMATECH |
| Other Authors: | Van Eck, Brad |
| Format: | Government Document eBook |
| Language: | English |
| Published: |
[Gaithersburg, MD] :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
[2004]
|
| Series: | NISTIR ;
7184. |
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo98859 |
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