Semiconductor factory and equipment clock synchronization for e-manufacturing /
| Main Author: | |
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| Corporate Authors: | , |
| Other Authors: | |
| Format: | Government Document eBook |
| Language: | English |
| Published: |
[Gaithersburg, MD] :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
[2004]
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| Series: | NISTIR ;
7184. |
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo98859 |
| Item Description: | "December 2004." Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. Title from page [1], viewed March 15, 2007. Electronic resource. |
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| Physical Description: | 1 online resource (27 pages) : illustrations. |
| Bibliography: | Includes bibliographical references (pages 26-27). |