Semiconductor factory and equipment clock synchronization for e-manufacturing /

Bibliographic Details
Main Author: Li, Ya-Shian
Corporate Authors: Electronics and Electrical Engineering Laboratory (National Institute of Standards and Technology), International SEMATECH
Other Authors: Van Eck, Brad
Format: Government Document eBook
Language:English
Published: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2004]
Series:NISTIR ; 7184.
Subjects:
Online Access:https://purl.fdlp.gov/GPO/gpo98859
Description
Item Description:"December 2004."
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from page [1], viewed March 15, 2007.
Electronic resource.
Physical Description:1 online resource (27 pages) : illustrations.
Bibliography:Includes bibliographical references (pages 26-27).