Mechanics of microsystems /
| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Hoboken :
Wiley,
[2018]
|
| Series: | Wiley microsystem and nanotechnology series ;
7646. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
|---|---|
| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781119053804 1119053803 9781119053811 1119053811 9781119053828 111905382X |