http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Fundamentals of microfabrication and nanotechnology
Volume I. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- Volume II. Manufacturing techniques for microfabrication and nanotechnology -- Volume III. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.