rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamentals of microfabrication and nanotechnology
  name:
    name part: Madou, Marc J.
    role:
      role term: creator
    role:
      role term: author.
  name:
    name part: Taylor & Francis
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: flu
    date issued: 2011
    edition: Third edition.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource.
  table of contents: Volume I. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- Volume II. Manufacturing techniques for microfabrication and nanotechnology -- Volume III. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
  note: Marc J. Madou.
  note: Electronic resource.
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Nanoelectromechanical systems
  classification: TK7875 .M33 2011
  classification: 620/.5
  identifier: 9781482274660
  identifier: 1482274663
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: NhCcYBP
    record creation date: 181206
    record change date: 20250816190827.6
    record identifier: in00004037004