A numerical and experimental analysis of reactor performance and deposition rates for CVD on monofilaments /

Bibliographic Details
Main Author: Gokoglu, Suleyman A. (Suleyman Akif) (Author)
Format: Government Document eBook
Language:English
Published: [Washington, D.C.] : National Aeronautics and Space Administration, [1990?]
Series:NASA technical memorandum ; 103631.
Subjects:
Online Access:https://purl.fdlp.gov/GPO/gpo92131
Description
Item Description:"Prepared for the 11th International Conference on Chemical Vapor Deposition (CVD-XI) sponsored by the Electrochemical Society Seattle, Washington, October 14-19, 1990."
Physical Description:1 online resource (7 pages) : illustrations.
Bibliography:Includes bibliographical references (pages 4-5).