A numerical and experimental analysis of reactor performance and deposition rates for CVD on monofilaments /
| Main Author: | |
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| Format: | Government Document eBook |
| Language: | English |
| Published: |
[Washington, D.C.] :
National Aeronautics and Space Administration,
[1990?]
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| Series: | NASA technical memorandum ;
103631. |
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo92131 |
| Item Description: | "Prepared for the 11th International Conference on Chemical Vapor Deposition (CVD-XI) sponsored by the Electrochemical Society Seattle, Washington, October 14-19, 1990." |
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| Physical Description: | 1 online resource (7 pages) : illustrations. |
| Bibliography: | Includes bibliographical references (pages 4-5). |