CMOS past, present and future /
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| Format: | eBook |
| Language: | English |
| Published: |
Duxford :
Woodhead Publishing,
2018.
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| Series: | Woodhead Publishing series in electronic and optical materials.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- 1. Brief introduction CMOS applications in our daily life; 2. Basic definitions and equations; 3. Electrical measurements (IV, short channel effects, mobility and noise); 4. CMOS Architecture; 5. Strain engineering (stressor materials in source/drain regions, strain induced by processing, stress liners); 6. High-k and metal gate (Almost all known high-k materials and metal gates); 7. Channel materials (Ge, GeSn, SiGe, Graphene and other II-D crystals, III-V compounds); 8. Contacts (Silicide formation, contact resistance, parasitic contacts); 9. Integration with photonic components (CMOS with lasers, detectors); 10. Technology roadmap (starting from 50's to unknown future); 11. Authors' final words.