Chemical vapour deposition (CVD : advances, technology, and applications /
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| Format: | eBook |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press/Taylor & Francis Group,
[2019]
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| Edition: | First edition. |
| Series: | Series in materials science and engineering ;
22. |
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource. |
| ISBN: | 9780429342363 0429342365 9781000690736 1000690733 9781000691078 1000691071 9781000690903 1000690903 |