Handbook of thin film deposition /

Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Seshan, Krishna (Editor), Schepis, Dominic (Editor)
Format: eBook
Language:English
Published: Oxford, United Kingdom ; Cambridge, MA, United States : William Andrew, and imprint of Elsevier, [2018]
Edition:Fourth edition.
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Published 2018
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Published 2018
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by Seshan, Krishna
Published 2012
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