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Handbook of thin film deposition /

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Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Seshan, Krishna (Editor), Schepis, Dominic (Editor)
Format:	eBook
Language:	English
Published:	Oxford, United Kingdom ; Cambridge, MA, United States : William Andrew, and imprint of Elsevier, [2018]
Edition:	Fourth edition.
Subjects:	Thin films > Handbooks, manuals, etc. Thin film devices > Design and construction. Electronic books.
Online Access:	Connect to the full text of this electronic book

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