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Handbook of thin film deposition /

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Seshan, Krishna (Editor), Schepis, Dominic (Editor)
Format: eBook
Language:English
Published: Oxford, United Kingdom ; Cambridge, MA, United States : William Andrew, and imprint of Elsevier, [2018]
Edition:Fourth edition.
Subjects:
Thin films > Handbooks, manuals, etc.
Thin film devices > Design and construction.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Includes index.
Electronic resource.
Physical Description:1 online resource.
ISBN:9780128123126
0128123125