ScienceDirect (Online service), Seshan, K., & Schepis, D. (2018). Handbook of thin film deposition (Fourth edition.). William Andrew, and imprint of Elsevier.
Chicago Style (17th ed.) CitationScienceDirect (Online service), Krishna Seshan, and Dominic Schepis. Handbook of Thin Film Deposition. Fourth edition. Oxford, United Kingdom ; Cambridge, MA, United States: William Andrew, and imprint of Elsevier, 2018.
MLA (9th ed.) CitationScienceDirect (Online service), et al. Handbook of Thin Film Deposition. Fourth edition. William Andrew, and imprint of Elsevier, 2018.
Warning: These citations may not always be 100% accurate.