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Non-classical crystallization of thin films and nanostructures in CVD and PVD processes /

Bibliographic Details
Main Author: Hwang, Nong Moon (Author)
Corporate Author: ProQuest (Firm)
Format: eBook
Language:English
Published: Dordrecht : Springer, 2016.
Series:Springer series in surface sciences ; v. 60.
Subjects:
Thin films.
Nanostructured materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • 1 Non-Classical Crystallization
  • 2 Thermodynamics of Physical and Chemical Vapour Deposition
  • 3 Nucleation
  • 4 Growth
  • 5 Diamond Synthesis at Low Pressure
  • 6 Growth Mechanism of CVD Diamond
  • 7 Growth Mechanism of CVD Silicon
  • 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures
  • 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser
  • 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure
  • 11 Deposition Behavior of Charged Nanoparticles
  • 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles
  • 13 Charge-Enhanced Kinetics
  • 14 Implications and Applications. .