Measurement technology for micro-nanometer devices /

Bibliographic Details
Main Author:	Zhang, Wendong (Author)
Corporate Author:	Wiley InterScience (Online service)
Format:	eBook
Language:	English
Published:	Solaris South Tower, Singapore : John Wiley & Sons, Singapore Pte. Ltd., 2017.
Subjects:	Microtechnology > Measurement. Nanotechnology > Measurement. Microelectromechanical systems > Testing. Physical measurements. Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents: