http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Measurement technology for micro-nanometer devices
Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.
Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue.
Includes bibliographical references and index.
Solaris South Tower, Singapore : John Wiley & Sons, Inc., [2016]