rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Measurement technology for micro-nanometer devices
  name:
    name part: Zhang, Wendong
    role:
      role term: creator
    role:
      role term: author.
  name:
    name part: Wiley InterScience (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: si
    date issued: 2017
    copyright date: 2017
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource.
  table of contents: Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.
  note: Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue.
  note: Electronic resource.
  note: Includes bibliographical references and index.
  subject:
    topic: Microtechnology
    topic: Measurement
  subject:
    topic: Nanotechnology
    topic: Measurement
  subject:
    topic: Microelectromechanical systems
    topic: Testing
  subject:
    topic: Physical measurements
  classification: TA418.9.N35 Z445 2017
  classification: 681/.2
  related item:
    title info:
      title: Measurement technology for micro-nanometer devices
    name:
      name part: Zhang, Wendong, author.
    origin info:
      publisher: Solaris South Tower, Singapore : John Wiley & Sons, Inc., [2016]
    identifier: (DLC) 2015026167
  identifier: 9781118717998
  identifier: 1118717996
  identifier: 9781118717981
  identifier: 1118717988
  identifier: 9781118717974
  identifier: 111871797X
  identifier: 9781118717967
  identifier: 1118717961
  identifier: 2015032319
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: NhCcYBP
    record creation date: 150818
    record change date: 20260609153610.3
    record identifier: in00003853952