Measurement technology for micro-nanometer devices /

Bibliographic Details
Main Author:	Zhang, Wendong (Author)
Corporate Author:	Wiley InterScience (Online service)
Format:	eBook
Language:	English
Published:	Solaris South Tower, Singapore : John Wiley & Sons, Singapore Pte. Ltd., 2017.
Subjects:	Microtechnology > Measurement. Nanotechnology > Measurement. Microelectromechanical systems > Testing. Physical measurements. Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Item Description:	Electronic resource.
Physical Description:	1 online resource.
Bibliography:	Includes bibliographical references and index.
ISBN:	9781118717981 1118717988 9781118717974 111871797X