Introduction to semiconductor technology /
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...
| Main Author: | |
|---|---|
| Corporate Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2012.
|
| Edition: | 2nd ed. |
| Series: | SPIE monograph ;
PM220. SPIE Digital Library. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations. |
|---|---|
| Item Description: | "SPIE Digital Library."--Website. Electronic resource. |
| Physical Description: | 1 online resource (xix, 656 pages) : illustrations, digital file. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 9780819490933 0819490938 9781628701043 1628701048 |