Handbook of silicon based MEMS : materials & technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...
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| Format: | eBook |
| Language: | English |
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Norwich, N.Y. :
William Andrew,
2010.
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| Series: | Micro & nano technologies.
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| Online Access: | Connect to the full text of this electronic book |
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