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Handbook of silicon wafer cleaning technology /

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The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with...

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Reinhardt, Karen A., Kern, Werner, 1925-
Format: eBook
Language:English
Published: Norwich, NY : William Andrew, [2008]
Edition:2nd ed.
Series:Materials science and process technology series.
Subjects:
Silicon-on-insulator technology.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Electronic books.
Online Access:Connect to the full text of this electronic book

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