APA (7th ed.) Citation

Knovel (Firm), Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology (2nd ed.). William Andrew.

Chicago Style (17th ed.) Citation

Knovel (Firm), Karen A. Reinhardt, and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd ed. Norwich, NY: William Andrew, 2008.

MLA (9th ed.) Citation

Knovel (Firm), et al. Handbook of Silicon Wafer Cleaning Technology. 2nd ed. William Andrew, 2008.