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Micro mechanical systems : principles and technology /

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In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Fukuda, T. (Toshio), 1948-, Menz, W. (Wolfgang)
Format: eBook
Language:English
Published: Amsterdam ; New York : Elsevier, 1998.
Series:Handbook of sensors and actuators ; v. 6.
Subjects:
Microelectromechanical systems > Handbooks, manuals, etc.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectromechanical systems.
Tecnologia.
Engenharia eletrônica.
Electronic books. > local.
Microelectromechanical systems > Handbooks, manuals, etc.
Microtechnology > Handbooks, manuals, etc.
Electronic books.
Handbooks and manuals.
Online Access:Connect to the full text of this electronic book

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