APA (7th ed.) Citation

Knovel (Firm), Fukuda, T., & Menz, W. (1998). Micro mechanical systems: Principles and technology. Elsevier.

Chicago Style (17th ed.) Citation

Knovel (Firm), T. Fukuda, and W. Menz. Micro Mechanical Systems: Principles and Technology. Amsterdam ; New York: Elsevier, 1998.

MLA (9th ed.) Citation

Knovel (Firm), et al. Micro Mechanical Systems: Principles and Technology. Elsevier, 1998.