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Fabrication engineering at the micro and nanoscale /

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Bibliographic Details
Main Author: Campbell, Stephen A., 1954-
Corporate Author: Knovel (Firm)
Format: eBook
Language:English
Published: New York : Oxford University Press, 2008.
Edition:3rd ed.
Series:Oxford series in electrical and computer engineering.
Subjects:
Semiconductors > Design and construction.
Semiconductors > Mathematical models.
Semiconducteurs > Conception et construction.
Semiconducteurs > Modèles mathématiques.
Microélectronique.
Nanoélectronique.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • An introduction to microelectronic fabrication
  • Semiconductor substrates
  • Diffusion
  • Thermal Oxidation
  • Ion Implantation
  • Rapid thermal processing
  • Optical lithography
  • Photoresists
  • Nonoptical lithographic techniques
  • Vacuum Science and plasmas
  • Etching
  • Physical deposition: evaporation and sputtering
  • Chemical vapor deposition
  • Epitaxial growth
  • Device isolation, contacts, and metalization
  • CMOS technologies
  • Other transistor technologies
  • Optoelectronic technologies
  • MEMS
  • Integrated circuit manufacturing.