rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fabrication engineering at the micro and nanoscale
  name:
    name part: Campbell, Stephen A.
    name part: 1954-
    role:
      role term: creator
  name:
    name part: Knovel (Firm)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    date issued: 2008
    edition: 3rd ed.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xiv, 647 pages) : illustrations.
  table of contents: An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum Science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metalization -- CMOS technologies -- Other transistor technologies -- Optoelectronic technologies -- MEMS -- Integrated circuit manufacturing.
  note: Stephen A. Campbell.
  note: Electronic resource.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Design and construction
  subject:
    topic: Semiconductors
    topic: Mathematical models
  subject:
    topic: Semiconducteurs
    topic: Conception et construction
  subject:
    topic: Semiconducteurs
    topic: Modèles mathématiques
  subject:
    topic: Microélectronique
  subject:
    topic: Nanoélectronique
  subject:
    topic: Semiconductors
    topic: Design and construction
  subject:
    topic: Semiconductors
    topic: Mathematical models
  classification: TK7871.85 .C25 2008eb
  classification: 621.3815/2
  related item:
    title info:
      title: Science and engineering of microelectronic fabrication
    name:
      name part: Campbell, Stephen A.,
      name part: 1954-
  related item:
    title info:
      title: Fabrication engineering at the micro and nanoscale
    name:
      name part: Campbell, Stephen A., 1954-
    origin info:
      publisher: New York : Oxford University Press, 2008
      edition: 3rd ed.
    identifier: (DLC) 2007013450
    identifier: (OCoLC)122338108
  related item:
    title info:
      title: Oxford series in electrical and computer engineering
  identifier: 9781613441107
  identifier: 161344110X
  identifier: 9780195320176
  identifier: 0195320174
  identifier: 2007013450
  identifier: Knovel Corporation
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: KNOVL
    record creation date: 110728
    record change date: 20260609152705.8
    record identifier: in00003831028
    language of cataloging:
      language term: eng