Fabrication engineering at the micro and nanoscale /
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
New York :
Oxford University Press,
2008.
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| Edition: | 3rd ed. |
| Series: | Oxford series in electrical and computer engineering.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource (xiv, 647 pages) : illustrations. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781613441107 161344110X 9780195320176 0195320174 |