Thin film processes II /
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to t...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Academic Press,
[1991]
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| Series: | Thin film processes ;
2 |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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