Thin film materials technology : sputtering of compound materials /
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...
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| Format: | eBook |
| Language: | English |
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Norwich, NY : Heidelberg :
William Andrew Pub. ; Springer,
[2004]
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| Online Access: | Connect to the full text of this electronic book |
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