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Thin film materials technology : sputtering of compound materials /

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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...

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Bibliographic Details
Main Author: Wasa, Kiyotaka
Corporate Author: Knovel (Firm)
Other Authors: Kitabatake, Makoto, Adachi, Hideaki
Format: eBook
Language:English
Published: Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, [2004]
Subjects:
Cathode sputtering (Plating process)
Thin films.
Sputtering (Physics)
Thin Films.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Thin Film Materials and Devices
  • Thin Film Process
  • Sputtering Phenomena
  • Sputtering Systems
  • Deposition of Compound Thin Films
  • Structural Control of Compound Thin Films
  • Microfabrication by Sputtering
  • Appendices
  • Index.