Wasa, K., Kitabatake, M., & Adachi, H. (2004). Thin film materials technology: Sputtering of compound materials. William Andrew Pub. ; Springer.
Chicago Style (17th ed.) CitationWasa, Kiyotaka, Makoto Kitabatake, and Hideaki Adachi. Thin Film Materials Technology: Sputtering of Compound Materials. Norwich, NY : Heidelberg: William Andrew Pub. ; Springer, 2004.
MLA (9th ed.) CitationWasa, Kiyotaka, et al. Thin Film Materials Technology: Sputtering of Compound Materials. William Andrew Pub. ; Springer, 2004.
Warning: These citations may not always be 100% accurate.