Semiconductor safety handbook : safety and health in the semiconductor industry /
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in t...
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| Format: | eBook |
| Language: | English |
| Published: |
Westwood, N.J. :
Noyes Publications,
[1998]
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| Series: | Semiconductor safety series.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in the semiconductor industry. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xxiv, 610 pages) : illustrations. |
| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1591241510 9781591241515 9780080946542 0080946542 |