http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
1 online resource (xx, 571 pages) : illustrations.
Provides technical applications for key processes such as laser diodes, LEDs, and very high temperature electronic controls on engines. Focuses on on doping, etching, oxidation passivation, growth techniques, etc.
Doping Limits and Bandgap Engineering in Wide Gap IIVI Compounds -- Epitaxial Growth of II-VI Compounds by MOVPE -- Ohmic Contacts to II-VI and III-V Compound Semiconductors -- Dry Etching of SiC -- Processing of Silicon Carbide for Devices and Circuits -- Plasma Etching of III-V Nitrides -- Ion Implantation in Wide Bandgap Semiconductors -- Rare Earth Impurities in Wide Gap Semiconductors -- SIMS Analysis of Wide Bandgap Semiconductors -- Hydrogen in Wide Bandgap Semiconductors -- Diamond Deposition and Characterization -- Index.
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
Includes bibliographical references and index.
Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., ©2000
Materials science and process technology series
153911:154071 Elsevier Science & Technology