rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of contamination control in microelectronics
    sub title: principles, applications, and technology
  name:
    name part: Tolliver, Donald L.
  name:
    name part: Knovel (Firm)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nju
    date issued: 1988
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xxi, 488 pages) : illustrations.
  abstract: Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control.
  note: edited by Donald L. Tolliver.
  note: Electronic resource.
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Design and construction
  subject:
    topic: Contamination (Technology)
  subject:
    topic: Contamination (Technology)
  subject:
    topic: Integrated circuits
    topic: Design and construction
  classification: TK7836 .H34 1988eb
  classification: 668/.374
  related item:
    title info:
      title: Handbook of contamination control in microelectronics
    origin info:
      publisher: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1988
    identifier: (DLC) 87031533
    identifier: (OCoLC)17200306
  related item:
    title info:
      title: Materials science and process technology series
  identifier: 1591240816
  identifier: 9781591240815
  identifier: 9780815511519
  identifier: 0815511515
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: KNOVL
    record creation date: 011121
    record change date: 20260609152721.8
    record identifier: in00003826366
    language of cataloging:
      language term: eng